R*evolution is a high-performance, remote plasma source designed for the generation of ultraclean reactive gas species required in the processing of semiconductor wafers. It provides a clean, high-flow supply of atomic/molecular radicals in a self-contained unit designed for easy on-chamber installation and operation. There are reduction in process times of 35-40%, and overall improvements in productivity of 10-15%. MKS Instruments Inc., www.mksinst.com .