DuPont Fluoroproducts today announced plans to build a manufacturing facility in China to produce nitrogen trifluoride (NF3), a chamber cleaning and etch gas used in semiconductor chip manufacturing and flat panel displays.
The plant will be located in Changshu, Jiangsu Province in China, where DuPont Fluoroproducts has established a new multi-product complex, as part of a larger DuPont strategy to double its investment in the region from the existing $600 million to $1.2 billion by 2010 . DuPont Fluoroproducts did not specify what percentage of the increase would be spent on this plant.

DuPont Fluoroproducts plans to install its purification technology to deliver grades of its Zyron NF3 electronic gases via the new plant, which will have 450 tones per year of initial capacity when production starts in 2007. 

“Flat panel displays and semiconductors are strategic growth markets for DuPont,” said Brian Engler, global business manager, Zyron electronic gases, in a statement. “Because we will continue to be a leading supplier of chamber cleaning gases and technologies in these industries, we are creating the ability to expand capacity in the future as the market for NF3 continues to grow.”